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Jane Chang
jpchang@ucla.edu
UC Los Angeles
Department of Chemical Engineering
Research: Plasma Technology

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Puneet Gupta - Director
puneet@ee.ucla.edu
UC Los Angeles
Department of Electrical Engineering
Research: DFM

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Andrew Kahng
abk@ucsd.edu
UC San Diego
Department of CSE and ECE
Research: DFM

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Tsu-Jae King Liu
tking@eecs.berkeley.edu
UC Berkeley
Department of EECS
Research: Devices

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Patrick Naulleau
pnaulleau@lbl.gov
UC Berkeley
Department of LBNL
Research: EUV Lithography and Metrology

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Andy Neureuther
neureuth@eecs.berkeley.edu
UC Berkeley
Department of EECS
Research: Lithography

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Kameshwar Poolla
poolla@me.berkeley.edu
UC Berkeley
Department of Mechanical Engineering
Research: Sensors & Control

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Costas Spanos
spanos@eecs.berkeley.edu
UC Berkeley
Department of EECS
Research: Lithography/Sensors & Control

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Avideh Zakhor
avz@eecs.berkeley.edu
UC Berkeley
Department of EECS
Research: Signal Processing and Lithography