IMPACT Seminar Schedule   Fall 2009

Join us in the Hughes Room, 400 Cory Hall at UC Berkeley (except as noted *),
or by webinar teleconference (requires registration)

Seminars are held every other Wednesday, 1:10pm - 2:00pm Pacific Time

Date	Presenter	Topic	Abstract
09/02/2009	Prof. Andy Neureuther	Lithography Highlights from IMPACT and More: Ring-Oscillators, Mask Edge Effects, and EUV Defect Printability	Abstract
09/16/2009	Prof. David Dornfeld	Life Cycle Assessment of Semiconductor Manufacturing	Abstract
09/30/2009	Prof. Tsu-Jae King Liu	Segmented MOSFET Technology for Reduced Variability	Abstract
10/14/2009	Prof. Kyriakos Komvopoulos	Mechanics of Nanoscale Surface Polishing	Abstract
10/28/2009	Prof. Puneet Gupta	Modeling and Evaluating Design Rule and Patterning Interactions	Abstract
11/18/2009 *	Prof. Costas Spanos	IC Variability Modeling and Applications	Abstract
12/02/2009 **	Prof. David Graves	Mechanisms of Plasma-Induced 193 nm Photoresist Roughening	Abstract

* Seminar held in Cory 540A
** Seminar held in Cory 337, Room A